Favia, PaolaPaolaFaviaArimura, HiroakiHiroakiArimuraCapogreco, ElenaElenaCapogrecoEneman, GeertGeertEnemanMertens, HansHansMertensHikavyy, AndriyAndriyHikavyyRichard, OlivierOlivierRichardWitters, LiesbethLiesbethWittersKundu, ParomitaParomitaKunduLoo, RogerRogerLooVancoille, EricEricVancoilleBender, HugoHugoBender2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32953TEM investigation of gate-all-around nanowire devicesMeeting abstract