Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applications

Ghorbani, LeilaLeilaGhorbaniKundu, ShreyaShreyaKunduLazzarino, FredericFredericLazzarinoDe Gendt, StefanStefanDe Gendt2025-06-192023-09-152025-06-192023-09-25N/Ahttps://imec-publications.be/handle/20.500.12860/42549Study reactive ion etching- transformer coupled plasma (RIE-TCP) mode for patterning of MgZnO alloys, used for computing and memory applicationsMeeting abstract10.1145/3568162.3578633Etching-MgZnO