Revealing the three-dimensional shape of atom probe tips by atomic force microscopy

Fleischmann, ClaudiaClaudiaFleischmannParedis, KristofKristofParedisMelkonyan, DavitDavitMelkonyanVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-2520180304-3991https://imec-publications.be/handle/20.500.12860/30712Revealing the three-dimensional shape of atom probe tips by atomic force microscopyJournal articlehttps://www.sciencedirect.com/science/article/abs/pii/S030439911730445X