Probing the evolution of electrically active defects in doped ferroelectric HfO2 during wake-up and fatigue

Celano, UmbertoUmbertoCelanoChen, Yi-HsuanYi-HsuanChenMinj, AlbertAlbertMinjBanerjee, KaustuvKaustuvBanerjeeRonchi, NicoloNicoloRonchiMcMitchell, SeanSeanMcMitchellVan Marcke, PatriciaPatriciaVan MarckeFavia, PaolaPaolaFaviaWu, T. L.T. L.WuKaczer, BenBenKaczerVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdtvan der Heide, PaulPaulvan der Heide2022-01-202021-11-022022-01-2020200743-1562WOS:000668063000082https://imec-publications.be/handle/20.500.12860/37750Probing the evolution of electrically active defects in doped ferroelectric HfO2 during wake-up and fatigueProceedings paper978-1-7281-6460-1WOS:000668063000082