Gillot, ChristopheChristopheGillotDe Backer, E.E.De BackerGrillaert, JoostJoostGrillaertHeylen, NancyNancyHeylenVaca, L. M.L. M.VacaBlavier, G.G.Blavier2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3465Impact of dummy metal structures on post oxide CMP planarizationProceedings paper