Daltrini, AndreAndreDaltriniMoshkalev, StanislasStanislasMoshkalevSwart, LauraLauraSwartVerdonck, PatrickPatrickVerdonck2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11935Plasma parameters obtained with planar probe and optical emission spectroscopyJournal article