CD control for two-dimensional features in future technology nodes

Verhaegen, StafStafVerhaegenGordon, R.R.GordonJonckheere, RikRikJonckheereMcCallum, M.M.McCallumRonse, KurtKurtRonse2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5809CD control for two-dimensional features in future technology nodesProceedings paper