Capacitive field-effect (bio-)chemical sensors based on nanocrystalline diamond films

Bäcker, M.M.BäckerPoghossian, A.A.PoghossianAbouzar, M.H.M.H.AbouzarWenmackers, S.S.WenmackersJanssens, S.D.S.D.JanssensHaenen, KenKenHaenenWagner, PatrickPatrickWagnerSchöning, M.J.M.J.Schöning2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16687Capacitive field-effect (bio-)chemical sensors based on nanocrystalline diamond filmsProceedings paper