Investigating the effects of subtrate temperature and holder position on the structural and optical behavior of sputtered hexagonal boron nitride films

Hoang, Duc Q.Duc Q.HoangPobedinskas, PauliusPauliusPobedinskasJanssens, StoffelStoffelJanssensD'Haen, JanJanD'HaenHaenen, KenKenHaenen2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23940Investigating the effects of subtrate temperature and holder position on the structural and optical behavior of sputtered hexagonal boron nitride filmsOral presentation