Mertens, PaulPaulMertensBearda, TwanTwanBeardaHoussa, MichelMichelHoussaLoewenstein, LeeLeeLoewensteinCornelissen, IngridIngridCornelissenDe Gendt, StefanStefanDe GendtKenis, KarineKarineKenisTeerlinck, IvoIvoTeerlinckVos, RitaRitaVosMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3672Advanced cleaning for the growth of ultrathin gate oxideJournal article