Janssens, TomTomJanssensHuyghebaert, CedricCedricHuyghebaertVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7685Towards a model for the formation of positive Si+ ionsJournal article