Gueneau de Mussy, Jean PaulJean PaulGueneau de MussyBruynseraede, ChristopheChristopheBruynseraedeTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyerMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10533Novel selective sidewall airgap processProceedings paper