Ciofi, IvanIvanCiofiRoussel, PhilippePhilippeRousselSaad, YvesYvesSaadMoroz, VictorVictorMorozHu, JojoJojoHuBaert, RogierRogierBaertCroes, KristofKristofCroesContino, AntoninoAntoninoContinoVandersmissen, KevinKevinVandersmissenGao, WeiminWeiminGaoMatagne, PhilippePhilippeMatagneBadaroglu, MustafaMustafaBadarogluWilson, ChrisChrisWilsonMocuta, DanDanMocutaTokei, ZsoltZsoltTokei2021-10-242021-10-2420170018-9383https://imec-publications.be/handle/20.500.12860/28036Modeling of via resistance for advanced technology nodesJournal articlehttp://ieeexplore.ieee.org/document/7895180/