Swerts, JohanJohanSwertsSalimullah, M.M.M.M.SalimullahPopovici, Mihaela IoanaMihaela IoanaPopoviciKim, Min-SooMin-SooKimPawlak, MalgorzataMalgorzataPawlakDelabie, AnneliesAnneliesDelabieSchaekers, MarcMarcSchaekersTomida, KazuyukiKazuyukiTomidaKaczer, BenBenKaczerOpsomer, KarlKarlOpsomerVrancken, ChristaChristaVranckenDebusschere, IngridIngridDebusschereAltimime, LaithLaithAltimimeKittl, JorgeJorgeKittlVan Elshocht, SvenSvenVan Elshocht2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19856Plasma enhanced atomic layer deposited Ru for MIMCAP applicationsProceedings paper