Herms, MartinMartinHermsWagner, MatthiasMatthiasWagnerKayser, StefanStefanKayserKießling, FrankFrankKießlingPoklad, AnnaAnnaPokladZhao, MingMingZhaoKretzer, UlrichUlrichKretzer2021-10-252021-10-2520181369-7021https://imec-publications.be/handle/20.500.12860/30878Defect-induced stress imaging in single and multi-crystalline semiconductor materialsJournal articlehttps://www.sciencedirect.com/science/article/pii/S2214785318306539