Electromigration-induced drift in damascene vs. conventional interconnects: an intrinsic difference

Proost, JorisJorisProostSamajdar, I.I.SamajdarWitvrouw, AnnAnnWitvrouwMaex, KarenKarenMaex2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2887Electromigration-induced drift in damascene vs. conventional interconnects: an intrinsic differenceProceedings paper