Comparing the performance of direct and parametric drives for piezoelectric MEMS actuators

Houri, SamerSamerHouriRochus, VeroniqueVeroniqueRochus2025-06-292025-06-292025-JUN 10003-6951WOS:001510180800007https://imec-publications.be/handle/20.500.12860/45861Comparing the performance of direct and parametric drives for piezoelectric MEMS actuatorsJournal article10.1063/5.0276761WOS:001510180800007AMPLIFICATION