Ekkels, PhillipPhillipEkkelsRottenberg, XavierXavierRottenbergPuers, BobBobPuersTilmans, HarrieHarrieTilmans2021-10-162021-10-162007-01https://imec-publications.be/handle/20.500.12860/12117Surface micromachined platinum structures with a high thermal stabilityProceedings paper