2D micro-chamber for DC plasma working at low power

Rochus, VeroniqueVeroniqueRochusSamara, VladimirVladimirSamaraVereecke, BartBartVereeckeSoussan, PhilippePhilippeSoussanOnsia, BartBartOnsiaRottenberg, XavierXavierRottenberg2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/244402D micro-chamber for DC plasma working at low powerProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6813810&contentType=Conference+Publications