Calculation of the electron mobility in III-V inversion layers with high-kappa dielectrics

O'Regan, TerranceTerranceO'ReganSoree, BartBartSoreeFischetti, MassimoMassimoFischettiJin, S.S.JinMagnus, WimWimMagnusMeuris, MarcMarcMeuris2021-10-182021-10-1820100021-8979https://imec-publications.be/handle/20.500.12860/17746Calculation of the electron mobility in III-V inversion layers with high-kappa dielectricsJournal article