Porosity and critical properties of silica-based low-dielectric-constant materials

Baklanov, MikhaïlMikhaïlBaklanovTravaly, YoussefYoussefTravalyLe, Quoc ToanQuoc ToanLeShamiryan, DenisDenisShamiryanVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-162021-10-162005-05https://imec-publications.be/handle/20.500.12860/10052Porosity and critical properties of silica-based low-dielectric-constant materialsProceedings paper