Impact of Backside Power Delivery Network with Buried Power Rails on Latch-up Immunity in DTCO/STCO

Serbulova, KaterynaKaterynaSerbulovaChen, Shih-HungShih-HungChenHellings, GeertGeertHellingsVeloso, AnabelaAnabelaVelosoJourdain, AnneAnneJourdainDe Boeck, JoJoDe BoeckGroeseneken, GuidoGuidoGroesenekenDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchi2024-05-232023-11-302024-05-2320230739-5159WOS:001094864400025https://imec-publications.be/handle/20.500.12860/43202Impact of Backside Power Delivery Network with Buried Power Rails on Latch-up Immunity in DTCO/STCOProceedings paper978-1-58537-347-5WOS:001094864400025