Cu(Mn) seed layers in single damascene trenches with dimensions down to 30 nm

Volders, HennyHennyVoldersRichard, OlivierOlivierRichardCarbonell, LaureLaureCarbonellPalmans, RogerRogerPalmansVerdonck, PatrickPatrickVerdonckHeylen, NancyNancyHeylenKellens, KristofKristofKellensArmini, SilviaSilviaArminiBender, HugoHugoBenderZhao, LarryLarryZhaoTokei, ZsoltZsoltTokei2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14763Cu(Mn) seed layers in single damascene trenches with dimensions down to 30 nmMeeting abstracthttp://www.unex.berkeley.edu/eng/metal/