Adelmann, ChristophChristophAdelmannConard, ThierryThierryConardFranquet, AlexisAlexisFranquetBrijs, BertBertBrijsMunnik, FransFransMunnikBurgess, SimonSimonBurgessWitters, ThomasThomasWittersMeersschaut, JohanJohanMeersschautKittl, JorgeJorgeKittlVandervorst, WilfriedWilfriedVandervorstVan Elshocht, SvenSvenVan Elshocht2021-10-202021-10-2020120734-2101https://imec-publications.be/handle/20.500.12860/20254Compositional depth profiling of TaCN thin filmsJournal articlehttp://dx.doi.org/10.1116/1.4726261