Laser ablation of micro-photonic structures for efficient light collection and distribution

Shang, XiaobingXiaobingShangDesmet, AndresAndresDesmetDe Smet, JelleJelleDe SmetJoshi, PankajPankajJoshiCuypers, DieterDieterCuypersVan Put, StevenStevenVan PutVan Steenberge, GeertGeertVan SteenbergeVervaeke, MichaelMichaelVervaekeThienpont, HugoHugoThienpontDe Smet, HerbertHerbertDe Smet2021-10-222021-10-2220150022-3727https://imec-publications.be/handle/20.500.12860/25890Laser ablation of micro-photonic structures for efficient light collection and distributionJournal articlehttp://iopscience.iop.org/article/10.1088/0022-3727/48/24/245101/meta