Ragnarsson, Lars-AkeLars-AkeRagnarssonCho, Moon JuMoon JuChoChiarella, ThomasThomasChiarellaMitard, JeromeJeromeMitardSchram, TomTomSchramRohr, ErikaErikaRohrWitters, LiesbethLiesbethWittersTogo, MitsuhiroMitsuhiroTogoHoriguchi, NaotoNaotoHoriguchiThean, AaronAaronThean2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19650Ultrathin EOT scaling of high-k/metal gate stacksProceedings paper