Wang, FeiFeiWangZhang, PenchengPenchengZhangFang, WeiWeiFangLiu, KevinKevinLiuJau, JackJackJauWang, LesterLesterWangWan, AlexAlexWanHunsche, StefanStefanHunscheHalder, SandipSandipHalderLeray, PhilippePhilippeLeray2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27565Process window and defect monitoring using high-throughput e-beam inspection guided by computational hot spot detectionProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2507366