Investigation of the passivation properties of PECVD-silicon-nitride layers on silicon solar cells

Bitnar, B.B.BitnarGlatthaar, R.R.GlatthaarKeller, S.S.KellerKugler, J.J.KuglerSpiegel, M.M.SpiegelFath, PeterPeterFathWilleke, GerhardGerhardWillekeBucher, E.E.BucherDuerinckx, FilipFilipDuerinckxSzlufcik, JozefJozefSzlufcikNijs, JohanJohanNijsMertens, RobertRobertMertensNussbaumer, H.H.NussbaumerFerrazza, F.F.Ferrazza2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1742Investigation of the passivation properties of PECVD-silicon-nitride layers on silicon solar cellsProceedings paper