Deposition processes for the fabrication of epitaxial Si-O superlattices

Delabie, AnneliesAnneliesDelabieJayachandran, SuseendranSuseendranJayachandranMaggen, JensJensMaggenMeersschaut, JohanJohanMeersschautCaymax, MattyMattyCaymaxLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeyns2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22249Deposition processes for the fabrication of epitaxial Si-O superlatticesProceedings paper