Full-wafer in-situ fabrication and packaging of microfluidic flow cytometer with photo-patternable adhesive polymers

de Wijs, KoenKoende WijsLiu, ChengxunChengxunLiuMajeed, BivraghBivraghMajeedJans, KarolienKarolienJansO'Callaghan, JohnJohnO'CallaghanLoo, JosineJosineLooSohn, ErikErikSohnPeeters, SaraSaraPeetersVan Roosbroeck, RubenRubenVan RoosbroeckMiyazaki, TomokazuTomokazuMiyazakiHoshiko, KenjiKenjiHoshikoNishimura, IsaoIsaoNishimuraHieda, KatsuhikoKatsuhikoHiedaLagae, LiesbetLiesbetLagae2021-10-252021-10-2520181387-2176https://imec-publications.be/handle/20.500.12860/30562Full-wafer in-situ fabrication and packaging of microfluidic flow cytometer with photo-patternable adhesive polymersJournal articlehttps://rd.springer.com/article/10.1007%2Fs10544-017-0243-7