Stochastic effects in EUV lithography: random, local CD-variability and printing failures

De Bisschop, PeterPeterDe Bisschop2021-10-242021-10-2420171932-5150https://imec-publications.be/handle/20.500.12860/28107Stochastic effects in EUV lithography: random, local CD-variability and printing failuresJournal article10.1117/1.JMM.16.4.041013