Sherazi, YasserYasserSheraziChae, Jung KyuJung KyuChaeDebacker, PeterPeterDebackerMattii, LucaLucaMattiiRaghavan, PraveenPraveenRaghavanGerousis, V.V.GerousisVerkest, DiederikDiederikVerkestMocuta, AndaAndaMocutaKim, Ryan Ryoung hanRyan Ryoung hanKimSpessot, AlessioAlessioSpessotRyckaert, JulienJulienRyckaert2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31765Track height reduction for standard-cell in below 5nm node: How low can you go?Meeting abstracthttps://doi.org/10.1117/12.2297191