Verhaegen, StafStafVerhaegenErcken, MoniqueMoniqueErckenNackaerts, AxelAxelNackaertsVandenberghe, GeertGeertVandenberghe2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11506Litho enhancements for 45nm-node MuGFETsJournal article