In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/low-k damascene interconnects using synchrotron radiation

Wilson, ChrisChrisWilsonVolders, HennyHennyVoldersCroes, KristofKristofCroesPantouvaki, MariannaMariannaPantouvakiBeyer, GeraldGeraldBeyerHorsfall, Alton B.Alton B.HorsfallO'Neill, Anthony G.Anthony G.O'NeillTokei, ZsoltZsoltTokei2021-10-192021-10-1920100167-9317https://imec-publications.be/handle/20.500.12860/18359In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/low-k damascene interconnects using synchrotron radiationJournal article10.1016/j.mee.2009.06.023