Measurement and simulation of boron diffusion in strained Si1- xGex epitaxial layers with a linearly graded germanium profile

Krishnasamy, RajendranRajendranKrishnasamySchoenmaker, WimWimSchoenmaker2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5596Measurement and simulation of boron diffusion in strained Si1- xGex epitaxial layers with a linearly graded germanium profileJournal article