Dobrovolny, PetrPetrDobrovolnyMiranda Corbalan, MiguelMiguelMiranda CorbalanZuber, PaulPaulZuber2021-10-202021-10-2020121210-2512https://imec-publications.be/handle/20.500.12860/20616Sub-wavelength lithography and variability-aware SRAM characterizationJournal article