Characterization of the B and As pile-up at the Si-SiO2 interface

Fruehauf, JensJensFruehaufLindsay, RichardRichardLindsayVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaexBergmaier, A.A.BergmaierDollinger, G.G.DollingerKoch, F.F.Koch2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7591Characterization of the B and As pile-up at the Si-SiO2 interfaceProceedings paper