EUV single patterning for logic metal layers: achievement and challenge

Kim, Ryan Ryoung hanRyan Ryoung hanKimGillijns, WernerWernerGillijnsDrissi, YoussefYoussefDrissiTrivkovic, DarkoDarkoTrivkovicBlanco, VictorVictorBlancoLariviere, StephaneStephaneLariviereDe Ruyter, RudiRudiDe RuyterDehan, MorinMorinDehanMcIntyre, GregGregMcIntyreTan, Ling EeLing EeTan2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28683EUV single patterning for logic metal layers: achievement and challengeProceedings paperhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10450/1045004/EUV-single-patterning-for-logic-metal-layers--ac