Viapatterning in the 7nm node using immersion lithography and graphoepitaxy directed self-assembly

Doise, JanJanDoiseBekaert, JoostJoostBekaertChan, BTBTChanHori, MasafumiMasafumiHoriGronheid, RoelRoelGronheid2021-10-242021-10-2420171932-5150https://imec-publications.be/handle/20.500.12860/28264Viapatterning in the 7nm node using immersion lithography and graphoepitaxy directed self-assemblyJournal articlehttp://nanolithography.spiedigitallibrary.org/article.aspx?articleid=2633100