Silicon Photonics Co-integrated with Silicon Nitride for Optical Phased Arrays

Marinins, AleksandrsAleksandrsMarininsDwivedi, Sarvagya PaavanSarvagya PaavanDwivediKjellman, JonJonKjellmanKerman, SarpSarpKermanDavi, TanglaTanglaDaviFigeys, BrunoBrunoFigeysJansen, RoelofRoelofJansenSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanRottenberg, XavierXavierRottenbergSoussan, PhilippePhilippeSoussan2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33538Silicon Photonics Co-integrated with Silicon Nitride for Optical Phased ArraysProceedings paper