Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy

Senez, V.V.SenezArmigliato, A.A.ArmigliatoDe Wolf, IngridIngridDe WolfCarnevale, G.G.CarnevaleBalboni, R.R.BalboniFrabboni, S.S.FrabboniBenedetti, AlessandroAlessandroBenedetti2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8127Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopyJournal article