Hydrogen-related volatile defects as the possible cause for the recoverable component of NBTI

Grasser, T.T.GrasserRott, K.K.RottReisinger, H.H.ReisingerWaltl, M.M.WaltlWagner, P.P.WagnerSchanovsky, F.F.SchanovskyGoes, W.W.GoesPobegen, G.G.PobegenKaczer, BenBenKaczer2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22427Hydrogen-related volatile defects as the possible cause for the recoverable component of NBTIProceedings paper