Simulation of the effect of microstructure on the elastic properties of copper interconnects

Wilson, ChrisChrisWilsonOila, A.A.OilaSanderson, L.L.SandersonBull, S.S.BullRaskin, Jean-PierreJean-PierreRaskinCroes, KristofKristofCroesHorsfall, A.A.HorsfallO'Neill, A.A.O'NeillTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyer2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18358Simulation of the effect of microstructure on the elastic properties of copper interconnectsOral presentation