van der Veen, MarleenMarleenvan der VeenFarokhnejad, AnitaAnitaFarokhnejadMandal, Akhilesh KumarAkhilesh KumarMandalStruyf, HerbertHerbertStruyfPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2025-03-062025-03-062024979-8-3503-8518-22380-632XWOS:001411360600012https://imec-publications.be/handle/20.500.12860/45343Low Resistance Stacked Via Metallization for Future InterconnectsProceedings paper10.1109/IITC61274.2024.10732187979-8-3503-8517-5WOS:001411360600012