Spectroscopic critical dimension technology (SCD) for directed self assembly

Nishibe, SenichiSenichiNishibeDziura, ThaddeusThaddeusDziuraNagaswami, VenkatVenkatNagaswamiGronheid, RoelRoelGronheid2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24324Spectroscopic critical dimension technology (SCD) for directed self assemblyProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1859819