Recent advancements in EUV resist materials and process performance

Goethals, MiekeMiekeGoethalsNiroomand, ArdavanArdavanNiroomandVan Roey, FriedaFriedaVan RoeyHosokawa, KoheiKoheiHosokawaPollentier, IvanIvanPollentier2021-10-192021-10-1920110914-9244https://imec-publications.be/handle/20.500.12860/18969Recent advancements in EUV resist materials and process performanceJournal article