Subirats, AlexandreAlexandreSubiratsArreghini, AntonioAntonioArreghiniBreuil, LaurentLaurentBreuilDegraeve, RobinRobinDegraeveVan den Bosch, GeertGeertVan den BoschLinten, DimitriDimitriLintenFurnemont, ArnaudArnaudFurnemont2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29519Impact of discrete trapping in high pressure deuterium annealed and doped poly-Si channel 3D NAND macaroniProceedings paperhttp://ieeexplore.ieee.org/document/7936319/