Reactive ion etching of Pt and Pt-Metal stacks, for mems applications using the DSE systems at Imec

Jamieson, GeraldineGeraldineJamiesonSeveri, SimoneSimoneSeveriVan Hoof, RitaRitaVan HoofDu Bois, BertBertDu BoisHelin, PhilippePhilippeHelinBoullart, WernerWernerBoullart2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15528Reactive ion etching of Pt and Pt-Metal stacks, for mems applications using the DSE systems at ImecMeeting abstract