Electrostatic fringing-field actuator (EFFA): application towards a low-complexity RF-MEMS technology

Rottenberg, XavierXavierRottenbergNolmans, PhilipPhilipNolmansEkkels, PhillipPhillipEkkelsCzarnecki, PiotrPiotrCzarneckiMertens, RobertRobertMertensNauwelaers, BartBartNauwelaersDe Wolf, IngridIngridDe WolfDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-162021-10-162007-01https://imec-publications.be/handle/20.500.12860/12814Electrostatic fringing-field actuator (EFFA): application towards a low-complexity RF-MEMS technologyProceedings paper