Ge-based interface passivation for atomic layer deposited La-doped ZrO2

Molle, A.A.MolleBrammertz, GuyGuyBrammertzLamagna, L.L.LamagnaFanciulli, M.M.FanciulliMeuris, MarcMarcMeurisSpiga, S.S.Spiga2021-10-182021-10-1820090003-6951https://imec-publications.be/handle/20.500.12860/15882Ge-based interface passivation for atomic layer deposited La-doped ZrO2Journal articlehttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=APPLAB000095000002023507000001&idtype=cvips&prog=search